Bowl Protection Insert The SAWATEC Spin Modules are the optimal choice for manual or semi-automatic coating of thin layers. The cleanliness of the process chamber is very important to achieve good coating results. It is therefore advisable to clean the spin coater immediately after each use (cleaning instructions in accordance with the operating instructions). There are some places, which are often too little considered or need a little more cleaning effort (e. g., suction and media discharge in the process bowl, chuck receptacle, lid). In order to keep the cleaning effort for the process chamber to a minimum, SAWATEC has developed a good value bowl protection insert. This bowl protection insert is easy to remove and dispose of once the process has been completed. Advantages • Cost-effective and process-optimised solution • Perfect shape accurate fit in the process bowl • Significantly less contamination of the process chamber • Considerably shorter cleaning time • Simple replacement of the used bowl protection insert (disposable item)
