Undoped AlN Template on Sapphire(0001)

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AlN Template on sapphire (10x10mmx1000nm) is made by a Plasma Vapor Deposition of NanoColumns (PVDNC)-based method. AlN template is a cost effective way to replace AlN single cryst al substrate. Specifications Size 10mmx10mm Substrate Sapphire Orientation c axis (0001) +/- 1.0 deg. Type and Doping for the AlN film Undoped, Semi-insulating Macro Defect Density 90% Edge Exclusion Area 1mm Package Single Wafer Container AlN layer thickness 1000 nm +/- 5% Related data Surface Rughness and XRD data AlN MSDS Show more