ALD-GSL-4 is a two channels precision ALD precursor delivery unit with four channels MFC gas mixing and delivery system, which is designed for DIY an ALD coating system with any furnace or chamber for thin film growth and powder surface coating. The LCD touch screen provides easy control for ALD puls time and gas flow for each channel. SPECIFICATIONS Working Voltage AC 220V Single phase 50/60Hz Power 100 W PLC Touch Screen All parameters of ALD vapor pulse time and Gas flow are controlled by PLC via a 6" touchscreen panel in a mobile cart Control Two ALD valves with pulse duration time and cycling with microsecond precision Control For channels gas delivery with ±0.2%F.S via MFC Display vacuum pressure Other parameters upon request of the customer Please click the picture left to see the control interface RS485 Port and supplied software are included for remote operation by PC. ALD Valves Two ALD valves are inlcuded to deliver drying gas or liquid-vapor precursor vapor. The numbers of ALD channels can be customized upon request Max. frequency on/off: 283 HZ Min. Pulse time: 10 ms Mass Flow Controller Four MFC is included to deliver 4 types of carrying gases independently or by mixing Controlling Range: Controller 1: 0~100 SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM Note: Other range MFC can be customized at extra cost upon request. ] Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1.5% FS Liner: ±0.5-1.5%F.S. Duplicate accuracy: ±0.2%F.S. Gas Pipeline One stainless steel gas mixing tank is built-in Internal pipeline: 1/4" O.D stainless steel External pipeline: 1/4" O.D PTFE Gas Mixing Tank Φ80X120mm Stop Valve & Fittings 4 needle valves made of 316 Stainless Steel are included Φ1/4” Swagelok Tube Fitting Compliance All components are CE certified The unit can pass TUV(UL61010) or CSA certification at extra cost. Optional You may consider ordering a bubbler or vapor delivery system by clicking picture below We can help you to connect the ALD control unit with the MTI tube furnace at extra cost
