Improved ablation efficiency in microprocessing of silicon via GHz bursts of fs laser pulses

電気学会 電子図書館 Verified independent store

→

カテゴリ: 研究会(論文単位)論文No: OQD21012グループ名: 【C】電子・情報・システム部門 光・量子デバイス研究会発行日: 2021/03/26タイトル(英語): Improved ablation efficiency in microprocessing of silicon via GHz bursts of fs laser pulses 著者名: Caballero-Lucas Francesc(RIKEN),Obata Kotaro(RIKEN),Sugioka Koji(RIKEN)著者名(英語): Francesc Caballero-Lucas(RIKEN),Kotaro Obata(RIKEN),Koji Sugioka(RIKEN)キーワード: GHz burst mode|laser ablation|surface microfabrication|silicon|femtosecond laser|GHz burst mode|laser ablation|surface microfabrication|silicon|femtosecond laser要約(日本語): Ultrashort laser pulses confine material processing to the laser-irradiated area, providing precise ablation in diverse materials. However, challenges are encountered when high speeds for material removal and higher ablation efficiencies are required. GHz burst mode laser ablation has been proposed as a successful method to overcome these limitations. Following this approach, we studied the influence of GHz burst mode on ablation efficiency of silicon. In this study, each burst contained multiple pulses happening at an ultrafast repetition rate of 5 GHz. The obtained results show the differences between GHz burst mode and conventional single pulse mode laser ablation, with an outstanding increase in ablation efficiency for the GHz burst mode.要約(英語): Ultrashort laser pulses confine material processing to the laser-irradiated area, providing precise ablation in diverse materials. However, challenges are encountered when high speeds for material removal and higher ablation efficiencies are required. GHz burst mode laser ablation has been proposed as a successful method to overcome these limitations. Following this approach, we studied the influence of GHz burst mode on ablation efficiency of silicon. In this study, each burst contained multiple pulses happening at an ultrafast repetition rate of 5 GHz. The obtained results show the differences between GHz burst mode and conventional single pulse mode laser ablation, with an outstanding increase in ablation efficiency for the GHz burst mode.本誌: 2021年3月29日光・量子デバイス研究会本誌掲載ページ: 11-16 p原稿種別: 英語PDFファイルサイズ: 3,409 Kバイト Show more