カテゴリ: 論文誌(論文単位)グループ名: 【A】基礎・材料・共通部門発行日: 2021/01/01タイトル(英語): Investigation of Fabrication Conditions for VO2 Thin Films by MOD using Carbon Thermal Reduction著者名: 藤城 雄飛（防衛大学校 電気電子工学科），河原 正美（（株）高純度化学研究所），佐村 剛（（株）高純度化学研究所），立木 隆（防衛大学校 電気電子工学科），内田 貴司（防衛大学校 電気電子工学科）著者名(英語): Yuhi Fujishiro (National Defense Academy), Masami Kawahara (Kojundo Chemical Laboratory Co., Ltd.), Tsuyoshi Samura (Kojundo Chemical Laboratory Co., Ltd.), Takashi Tachiki (National Defense Academy), Takashi Uchida (National Defense Academy)キーワード: 有機金属分解 (MOD) 法，二酸化バナジウム (VO2)，炭素熱還元 metal-organic decomposition (MOD)，vanadium dioxide (VO2)，carbon thermal reduction要約(英語): Vanadium dioxide (VO2) thin films were fabricated by metal-organic decomposition (MOD). To utilize a carbon thermal reduction for obtaining a VO2 composition, the precursor films were fabricated at the temperature Tp from 300 to 380℃ in a N2 atmosphere. From the measurement results of XRD, diffraction peaks indicating VO2 phase were observed with a wide range of firing temperatures from Tf=560 to 620℃. Furthermore, the peaks indicating VO2 phase were also observed with a wide range of firing time from tf=15-45 min. Regarding the surface morphology of the films, the nanoparticles of 100-200 nm were densely packed although small spaces existed between the particles. The R-T characteristics of the films indicated the phase transition with a rapid resistance change of about three orders of magnitude and hysteresis loop. From these experimental results, it was found that wide windows of firing conditions for fabricating VO2 thin film can be obtained in the MOD process using the carbon thermal reduction.本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.141 No.1 （2021） 特集：2021年研究開発の動向と最前線本誌掲載ページ: 64-68 p原稿種別: 論文／日本語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/141/1/141_64/_article/-char/ja/
