カテゴリ: 論文誌(論文単位)グループ名: 【E】センサ・マイクロマシン部門発行日: 2013/03/01タイトル(英語): Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System著者名: Julien Malapert (Intelligent Semiconductor Microsystem Laboratory (iSML), Department of Electrical Engineering and Information Systems, Computing and Communication Systems Course, University of Tokyo), Satoshi Morishita (iSML, University of Tokyo), Manabu著者名(英語): Julien Malapert (Intelligent Semiconductor Microsystem Laboratory (iSML), Department of Electrical Engineering and Information Systems, Computing and Communication Systems Course, University of Tokyo), Satoshi Morishita (iSML, University of Tokyo), Manabu Ataka (Center for International Research on MicroMechatronics, Institute of Industrial Science, University of Tokyo), Hiroyuki Fujita (Center for International Research on MicroMechatronics, Institute of Industrial Science, University of Tokyo), Dominique Collard (Center for International Research on MicroMechatronics, Institute of Industrial Science (IIS), University of Tokyo/the Laboratory for Integrated MicroMechatronics Systems (EUJO/LIMMS), Centre National de la Recherche Scientifique (CNRS), Institute of Industrial Science, University of Tokyo), Yoshio Mita (iSML, University of Tokyo)キーワード: UV-patterned polyimide，thermal actuator，power regulation，micro-conveyor，integrated CMOS circuit要約(英語): We have been conducting autonomous distributed MEMS research since the early 1990s. We are now working on an international project involving a new concept based on a self-movable and self-reconfigurable micro-conveyor utilizing ciliary-type micro-actuators arranged in an array over a large surface. The fabrication of the ciliary motion system (CMS) has been successfully simplified using photosensitive polyimides patterned by a direct UV lithography technique. The characteristics of the new device are equivalent to those of the previous devices made by classical methods, including plasma ashing. We also propose an integrated CMOS circuit to accurately regulate the input power of the thermal actuators while preventing overheating.本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.3 （2013） 特集：センサ・マイクロマシン英文特集号本誌掲載ページ: 77-84 p原稿種別: 論文／英語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/3/133_77/_article/-char/ja/
