カテゴリ: 論文誌(論文単位)グループ名: 【E】センサ・マイクロマシン部門発行日: 2013/08/01タイトル(英語): Light-Driven Actuator Using Hydrothermally Deposited PLZT Film著者名: Daisuke Yamaguchi (Okayama University), Akimasa Tonokai (Okayama University), Takefumi Kanda (Okayama University), Koichi Suzumori (Okayama University)著者名(英語): Daisuke Yamaguchi (Okayama University), Akimasa Tonokai (Okayama University), Takefumi Kanda (Okayama University), Koichi Suzumori (Okayama University)キーワード: Piezoelectric material，Light-driven actuator，Hydrothermal method，PLZT film，Photostrictive effect要約(英語): Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased.本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.8 （2013） 特集：センサ・マイクロマシン用材料とその創成・評価技術本誌掲載ページ: 330-336 p原稿種別: 論文／英語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/8/133_330/_article/-char/ja/
