Synthesis and Characterization of Carbon Nanotube-Cu Composite using Supercritical Fluid Deposition

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カテゴリ: 論文誌(論文単位)グループ名: 【E】センサ・マイクロマシン部門発行日: 2014/02/01タイトル(英語): Synthesis and Characterization of Carbon Nanotube-Cu Composite using Supercritical Fluid Deposition著者名: Zhonglie An ( Graduate school of engineering, Tohoku University/Micro System Integration Center (μSIC), Tohoku University), Masaya Toda (Graduate school of engineering, Tohoku University), Takahito Ono (Graduate school of engineering, Tohoku University)著者名(英語): Zhonglie An (Graduate school of engineering, Tohoku University/Micro System Integration Center (μSIC), Tohoku University), Masaya Toda (Graduate school of engineering, Tohoku University), Takahito Ono (Graduate school of engineering, Tohoku University)キーワード: Carbon nanotubes-Cu composite，Supercritical fluid deposition，Thermal interface resistance要約(英語): We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2±0.3 g/cm3, and the volume percentage of voids is 3∼6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4∼42.1 mm2KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.2 （2014）本誌掲載ページ: 38-39 p原稿種別: 研究開発レター／英語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/2/134_38/_article/-char/ja/ Show more