Micro-Assembly of Electrostatically driven Scanning Force Microscopy Probe using Clip Mechanism

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カテゴリ: 論文誌(論文単位)グループ名: 【E】センサ・マイクロマシン部門発行日: 2015/03/01タイトル(英語): Micro-Assembly of Electrostatically driven Scanning Force Microscopy Probe using Clip Mechanism著者名: Yusuke Kawai (Gra duate School of Engineering, Tohoku University), Kyosuke Kotani (Graduate School of Engineering, Tohoku University), Chuan-Yu Shao (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku U著者名(英語): Yusuke Kawai (Graduate School of Engineering, Tohoku University), Kyosuke Kotani (Graduate School of Engineering, Tohoku University), Chuan-Yu Shao (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)キーワード: Micro-assembly，Scanning force microscopy，Electrostatic actuator，Micromechanism要約(英語): A micro-assembly technique for microstructures using a silicon clip mechanism is developed for a time-of-flight scanning force microscope (TOF-SFM) probe with an electrostatically driven actuator. Microsprings formed by deep reactive-ion etching are used for the clip micromechanism. Cantilever-shaped microelements for the TOF-SFM are handled by a manipulator, and the microgap between the microspring and opposite wall is expanded by pulling the microspring using a microneedle. Then, the microelement is inserted into the micromechanism, and is clipped by releasing the microspring. After assembly, all microelements are fixed with a conductive glue. Electrostatic actuation of the cantilevered microelement is demonstrated. This technique is advantageous in the fabrication of complex three-dimensional microstructures.本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.3 （2015） 特集：センサ・マイクロマシン英文特集号本誌掲載ページ: 98-102 p原稿種別: 論文／英語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/3/135_98/_article/-char/ja/ Show more