カテゴリ: 論文誌(論文単位)グループ名: 【E】センサ・マイクロマシン部門発行日: 2016/11/01タイトル(英語): Human Detection by Optical Readout Thermal Imaging Sensor using Evaporated Eu(TTA)3著者名: Min Wang (Micro System Integration Center (μSIC), Tohoku University), Takashiro Tsukamoto (Micro System Integration Center (μSIC), Tohoku University), Shuji Tanaka (Micro System Integration Center (μSIC), Tohoku University)著者名(英語): Min Wang (Micro System Integration Center (μSIC), Tohoku University), Takashiro Tsukamoto (Micro System Integration Center (μSIC), Tohoku University), Shuji Tanaka (Micro System Integration Center (μSIC), Tohoku University)キーワード: Infrared thermal imaging,Eu(TTA)3,Vacuum deposited luminescent phosphor要約(英語): This paper presents the design, fabrication and evaluation of an optical readout infrared thermal imaging sensor for human detection using vacuum evaporated Eu(TTA)3 phosphor. Eu(TTA)3 is served as an infrared (IR)-to-visible converter, which emits temperature dependent luminescence under specific ultraviolet (UV) excitation. The temperature sensitivity of luminescence intensity from Eu(TTA)3 was measured as about -2.1%/℃. An optical readout system was designed to measure the luminescence changes of the sensor pixels. Eu(TTA)3 on the sensor pixels is excited by a light emitting diode (LED) with 355 nm wavelength, and a visible luminescence map on the sensor pixels is projected onto a charge-coupled-device (CCD) camera. Thermal images of human were successfully obtained by using a 76 × 98 imaging sensor array with a carefully designed IR optics. The noise analysis shows that the noise-equivalent temperature difference (NETD) of the system is about 1.8 K.本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.136 No.11 (2016) 特集:マイクロマシン・MEMSを支えるナノテク技術本誌掲載ページ: 473-477 p原稿種別: 論文/英語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/11/136_473/_article/-char/ja/