カテゴリ: 論文誌(論文単位)グループ名: 【E】センサ・マイクロマシン部門発行日: 2020/09/01タイトル(英語): StructureーBased Huge HardーSpring Torsional Resonator Coupled with Thermal Bending for Infrared Sensor著者名: Masaki Okamoto (Department of Advanced Science and Technology, Toyota Technological Institute), Tomoya Hatagaki (Department of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Meijo University), Minoru Sasaki (Department o著者名(英語): Masaki Okamoto (Department of Advanced Science and Technology, Toyota Technological Institute), Tomoya Hatagaki (Department of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Meijo University), Minoru Sasaki (Department of Advanced Science and Technology, Toyota Technological Institute)キーワード: thin film torsional resonator,huge hardーspring effectthermal bendinginfrared sensor要約(英語): A temperatureーsensitive electrostatic resonator is realized which hardens the torsional spring being coupled with the static thermal bending. The principle for increasing the natural frequency mainly relates with the structure. The realized changing ratio reached to +3790 ppm/K against the frequency at room temperature. This is more than 10ーtimes larger in magnitude and opposite in direction compared to the temperature dependence of the material used indicating the high sensitivity for the infrared sensor.本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.9 （2020） 特集：将来のIoTに向けたセンサ・センシングシステム技術本誌掲載ページ: 240-245 p原稿種別: 論文／英語電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/9/140_240/_article/-char/ja/
