MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes. This product did not have a display, it must be controlled by the computer using manufacturer software. Digital Mass Flow Controller for Gas Control Systems Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces. Used for accurately controlling and measuring the gas flow rate of high pressure. Ideal for CVD and other gas mixture applications. International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting. Specification Full scale range (N2) ( 0100,200,500,1000)SCCM Other range can be customized at extra cost, please email to [email protected] Accuracy ±1.0% S.P. (≥35% F.S.) ±0.35% F.S.(35% F.S.) Repeatability ±0.2% FS Linearity ±0.5% FS Response Time ≤1sec Valve Rest Position Normally Closed or Normally Open Temperature Coefficient Zero: ≤±0.05% F.S./ Span: ≤±0.1% F.S.≤30 SLM Span: ≤±0.2% F.S.30 SLM Zero Drift 0.6%F.S. per year without autozero Surface Finish(Ra) 25Ra Operation Temperature 545 Communication Interface for input Signal Digital: RS485 DeviceNetTM Analog:(05)VDC or (420)mA Communication Interface for Output Signal Digital: RS485 DeviceNetTM Analog:(05)VDC or (420)mA Power Supply ±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) Electronic Connector D-sub 9 pins male, D-sub 15 pins male, DeviceNetTM male Differential Pressure (0.050.35) Mpa≤10000SCCM (0.10.35) Mpa20000SCCM,30000SCCM (0.20.45) Mpa50000SCCM Max Pressure 3MPa Leak integrity 1×10-9 atm·cc / sec He1×10-10 Pa·m3 / sec He Seals Materials Viton; Neoprene Surface Chemistry (EP only) —— Fittings Swagelok1/4” Weight 1kg
