PCE-3 ( upgraded from PDC-32G-LD ) is a 3" compact plasma cleaner with digital vacuum sensor and display, and as well as the hinged door. which is designed for cleaning and removing nanoscale organic contamination on wafer up to 2" with various gas easily. The rate of organic removal is about 10 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before coating to the achieve a better film quality. If you do not have any experience for plasma surface cleaning, please refer to the articles as the follows: McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624. Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613. Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177. SPECIFICATIONS Features Cleaning and removing nanoscale organic contamination on wafers up to 2" with various gas easily. Excellent tool to pre-clean single crystal substrate before coating to the achieve a better film quality Hinged-type door for easy sample loading. 3" Diameter Quartz Chamber excellent for cleaning 2" wafers with option Quartz Boat The removable Quartz tube inside Quartz Chamber is easy to clean and replace. RF Power Input: Cleaner AC 208 - 240V, 50/60Hz, single phase, 20W ( for 110VAC, may use a transformer Output: RF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 680V 10 mA 7 W Medium Setting 700V 15 mA 11 W High Setting 720V 25 mA 18 W Plasma Chamber 3" diameter x 6.5" length quartz chamber 700 mL capacity High-purity quartz has a longer service life than glass. Vacuum Gauge & Display A digital vacuum gauge is installed on the hinged door. 1/8" NPT needle valve to qualitatively control gas flow and chamber pressure. 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting. Vacuum Pump One double-stage Rotary Vane Vacuum Pump is included. Please click the picture to the left for details Input Power Cleaner AC 208 - 240V, 50/60Hz, single phase Vacuum pump AC 208 - 240V, 50/60Hz, single phase (Cleaner controls the power line of the pump.) For operation under AC110V, you may order additional (1500W transformer) Working Gases Many inert gases can be chosen for plasma cleanings, such as N2, Ar, Air, and Mixed gas depending on what kind of material will be treated. ( Please select the two-channel gas mixer from the model selection)
