84115Sputter coater 108auto/SE withthickness controller MTM-20 Cressington 108 Sputter Coaters are ideal for routine sample preparation. Compact, economical and simple to operate, they offer rapid pumpdown times, fine-grain coatings and negligible sample heating. Cool, fine-grain sputtering is achieved with a very efficient dc magnetron head. A quick-change target method allows a range of metals to be used. The variable, safety-interlocked sputtering supply is not influenced by vacuum level. The Cressington 108auto/SE has the same specification as the 108auto except for the larger chamber size of 150mm Ø (5.9") x 165mm (6.5"). In automatic mode the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the (optional) MTM-20 controller can be used to terminate the sputtering process at the desired thickness. The 108auto/SE is intended for use in applications where coating thickness must have a very high degree of uniformity. The unique Rotary-Planetary-Tilt stage, originally developed for the 208hr high resolution coater, can be used on the 108auto/SE. The sputter current and argon gas pressure are set independently for the desired coating conditions. Pumping System The modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of approximately 16" x 24" (42cm x 60cm). The desktop pumping system is connected with a metal coupling system. The compact high speed rotary pump is mounted on an anti-vibration table with a desktop base. The pumping system can be easily extended into a dual pumping system to accommodate the Cressington Sputter Coater along side a Cressington Carbon Coater. SPECIFICATION Automatic sputter coater Chamber size 150mm Ø (5.9")Variable height, 165mm - 250mm (6.5" - 9.8") Sputter head Low voltage planar magnetronQuick target changeWrap-around dark-space shieldTarget shutter Sputter target Gold, Gold/Palladium or Platinum targets on order57mm Ø x 0.1mm thick Sputter supply Microprocessor basedSafety interlockedCurrent control independent of vacuumDigitally selectable current (10, 20, 30 or 40mA) Sample table Holds 12 SEM ½" stubsHeight adjustment through 60mm Analogue metering Vacuum, Atm - 0.001mbCurrent, 0 - 50mA Control method Automatic operation of gas purge and leak functionsAutomatic process sequencingFull manual overrideDigital timer, 5 - 300 seconds with pauseAutomatic vent Thickness monitoring Optional, MTM-10 Thickness control Optional, MTM-20 with termination facility Dimensions Width 420mm (16.5"), Depth 295mm (11.6"),Height 332mm (13.1") Weight 13Kg (28.7 lbs) Power 45 VA max (excluding rotary pump) Pumping system Rotary Pump High speed, direct drive 2-stage Pumping speed 2.5 m3/hr (50/60Hz)Pumpdown time to 0.1mb is 20/25 sec. Desktop system Vacuum pump is mounted on desktop compatible anti-vibration tableAll metal vacuum coupling system Dimensions Width 330mm (13.0"), Depth 215mm (8.5"),Height 210mm (8.3"), 270mm (10.6") with filter Weight 15Kg (33.2 lbs) Power 130 VA Services required Supply 100 - 120 or 200 - 240 VAC, 50/60Hz(specify on order) Power 170 VA max Argon gas Purity, min. 99.9%Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)Hose connection, 6.0mm (¼")
