EQ-TFMS-LD is the thin film thickness measurement system that provides a quick and reliable solution for measuring the thickness of Translucent or Low Absorbing thin films from 15 nm to 50 um with 400 nm - 1100 nm spectral range. The measurement is based on specular reflectance and uses fiber optics reflectance probe. The compact system is easy to setup and user-friendly.SPECIFICATIONS: Features Real time measurement and analysis: Multi-layer, thin, thick, freestanding and nonuniform layers Extensive material library: 500+ materials Support of parameterized materials: Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA Flexible: Desktop or in-situ, R&D or inline. Measurement: Thickness, optical constants, surface roughness User-friendly and powerful: One-click measurement and analysis Majority of Translucent or Low Absorbing Films Oxides (See Pic 1 for example) Nitrides Photoresists Polymers (See Pic 2 for example) Semiconductors: Si, aSi, polySi Hard Coating: SiC, DLC Polymer Coating: Paralene, PMMA, Polyamides Thin Metal Coating (< 50 nm thickness. See Pic 3 for example) Pic 1 - 3 um LiNbO3 Pic 2 - 45 um PET Pic 3 - 20 nm Cu Thickness Range 15 nm - 75 um for non-metallic, translucent materials as listed above Note: metallic films can only be measured up to 50 nm reliably; X-Ray measurements are needed for thicker films Spectral Range 400 nm - 1100 nm Precision 0.01 nm or 0.01% Accuracy 0.2% or 1 nm Stability 0.02 nm or 0.03% Spot Size 2 mm minimum Sample Size Requirement Minimum 5 mm x 5 mm for reliable measurement Spectrometer/Detector 2048/4096 pixels CMOS 16 bit ADC 400 - 1100 nm wavelength range Spectral resolution: < 1 nm Power 100 -240 VAC, 50/60 Hz, 20 W power Light Source 5 W Tungsten-halogen lamp CT 2800 degree Lifetime: 10000 hours Reflectance Probe Fiberoptics, 400 um fiber core with spectrometer leg and Illumination leg Face-Up Measurement The film sample faces up with probe and light source pointing down Communication Interface and Laptop Computer USB connector to communicate with PC One brand new Laptop with software installed is included for immediate use Software: TFCompanion Large library of refractive index (n) and extinction coefficient (k) values for the most common metallic, dielectric, amorphous and crystalline substrate materials Capability for analyzing simple and the most complex film stacks Error estimation and simulation tools allow for factoring in the effects of changing conditions Support for parameterized materials with approximations representing optical dispersion in a desired spectral range using few coefficients that can be adjusted Software Option Remote control (TCP) based on Modbus protocol at extra cost Measurement Standard (Included) Bare Si Reference and 200 nm thick silicon oxide test wafer are included as thin-film standards for thickness measurement verification Application Note An example of metal thin film thickness measurement using the reflectance spectrometer can be downloaded here (Click Pic below)
