UHV-EL Reference Standards for EDS/WDS
Ultra High Vacuum CompatibleMicro and Macro AnalysisStandard for Surface & X-ray Analysis UHV (ultrahigh vacuum) compatible (10-10 torr) Suitable for spectral and intensity referen ces for EDS, WDS, EPMA, Auger, XPS, ESCA, etc. Custom and standard reference material configurations Rectangular or circular retainers holding from 6 to 37 reference standards Retainers machined from SS304 Custom mounting bases available Each reference standard is individually and separately prepared from bulk or powdered materials, polished with the most suitable method, and can easily be removed or reinserted into the retainer Analysis accuracies of 1-2% (relative) are possible only when appropriate standards are used. UHV systems cannot accept commonly available standard sets because of outgassing of mount materials and degradation from electron beam heating. The use of bakelite, plastic or epoxy embedded standards under UHV conditions have prevented accurate analysis. These inaccuracies are caused by compromised vacuum levels and contaminated reference standards. Also, standardless techniques give no indication that some elements may not be accounted for or are present in an oxide phase.Reference standards supplied with the UHV-EL, which contain only UHV compatible materials, can be used to characterize the transmission of the electron energy analyzer, determine peak shapes, resolution, energies and sensitivity factors.Since generalized sensitivity factors cannot be used with a reasonable degree of accuracy, even for the same instrument model, it is necessary for these factors to be determined for each unique instrument, on a continuing basis. Conditions will change over time because of peak shift, amplifier settings and spectrometer tolerances. Construction and DesignThe retainer is precision machined from stainless steel 304. Each retainer has holes machined with a 0.13mm boss at the top. All reference standards are precisely referenced within 0.13mm of the top surface. This recess protects the reference standard surfaces from contamination and scratching and also minimizes the possibility of X-ray fluorescence from the retainer. The reference standards, which are of various thicknesses, are retained by SS304 clips which are inserted from the back of the mount. The round UHV-EL-37 is laser engraved to assist in locating the desired reference standard using electron Reference standards are individually sized and polished according to the properties of the material. Cross contamination and smearing is avoided. If a reference standard surface gets roughened from excessive ion beam sputtering or is too highly oxidized, it can be easily removed and replaced in your laboratory. Tools and clips are provided. If bulk materials are not available for some reference standards, powders are used. They are consolidated with silver flake and the powder grains metallographically polished. Many insulators prepared this way are sufficiently conductive for X-ray and Auger analysis without carbon coating; all minerals and glasses are coated with ~20nm of carbon. The silver can be used for reference when determining sensitivity factors. Custom PreparationYour materials may be inserted into one of the retainers described using careful techniques. Electron beam X-ray techniques and reference standards - which are charge sensitive - can be carbon coated. All nonconductive minerals and glasses are coated with ~20nm of carbon. ShippingUHV-EL-37 circular retainer reference standards are shipped in a VACU-STORR container. It is optional for other configurations or custom orders. CertificationThe purity or composition of each reference standard is certified by the manufacturer. The SRM classes and certified alloys are NIST traceable, please see information on Reference Standards and Alloys below. Retainers Thickness of retainers is 4.7mm • Dimension accuracy is ±0.5mm To order, select Retainer Style and reference standard locations and numbers: use the submit form. Click on part number for retainer style to open element location form. Alternatively, print the submit form, fill in the corresponding numbers for elements/compounds and fax it to us at: +1 530-243-3761.See below for a list of elements and compounds and their respective order numbers. Please note: products containing Bi are only available for sale in the U.S.A. All minerals and glasses are coated with ~20nm of carbon. If you want uncoated standards, please put this on your order. UHV-EL 3725mm Round UHV-EL 1825 x 12mm Rectangular UHV-EL 1521 x 12mm Rectangular UHV-EL 1217 x 12mm Rectangular UHV-EL 913 x 12mm Square UHV-EL 69 x 12mm Rectangular Large Set Screw Vise for Rectangular UHV-EL Retainers Large Set Screw Vise is compatible with UHV-EL Rectangular Retainers. Largest 25 Retainer (#6069 or #6079) will go over edge of holder slightly. Bottom image shown with UHV-EL 12 Retainer (not included). Set Screw Vise with an open slot of 13.2mm (0.520") wide x 3.9mm (0.155") deep. Ø25mm (1") x 17.5mm (0.69") high. Made of machined aluminum with stainless steel set screws. Two sizes of set-screws included, M3 x 6mm and M3 x 8mm. Holder has a 9.5mm long 3.2mm (1/8") diameter pin. Allen wrench included. Holder For UHV-EL 37 Round Retainer, 25mm Diameter Specimen holder for 1" and 25mm metallographic mounts and other cylindrical 1" diameter samples. Holder height is 0.33" (8.4mm, not including pin) with a recessed area 0.15" (3.8mm) deep. Pin is short 6mm length with standard 3.2mm (1/8") diameter. Pin is removable, base is M4 threaded. Open sides for easier sample removal. Made of machined aluminum with two stainless steel Allen screws (M3 x 6mm and M3 x 12mm) and Allen wrench included. Shown with UHV-EL 37 Retainer (not included). Round UHV-EL Retainer can be ordered in Standard or Custom Configuration Standard Configuration for Round Retainer The Standard Configuration is shown above. A custom configuration requires that details be given regarding the elements chosen and the configuration (a "blank" Custom Round Retainer is shown for ordering - please print out and fill in exactly as needed). Note: For custom configuration designate reference standard locations and numbers: use the submit form or print out the submit form, fill in the numbers in the actual spaces for the desired elements/compounds and fax it to us at: 530-243-3761. See below for a list of elements and compounds, preceded by their respective order numbers. Reference Standards for UHV-EL Retainers Abbreviations M Natural mineral Opt Optical crystal P Powder or grains: mixed with either Ag or Sn (for S containing materials) and pressed TF Thin film on silicon wafer VD Vapor deposit (CVD, LPCVD, etc.) B Bulk material C Crystalline EM End member mineral F Foil HP Hot pressed Purity "N" is the # of "9"'s. 5N stands for 99.999% pure, 2N5 is 99.5% pure "+" Higher purity ? No certificate available. Most original containers with marked purity. With EDS analysis we see no additional elements (>0.1%) * These standards are very sensitive to humidity and should be kept in vacuum. We suggest using our Vacu-Storr™ Desiccators. Element/Compound Symbol Form Purity 1. Aluminum Al F 4N 2. Aluminum Fluoride AlF3 P 2N5 3. Aluminum Oxide Al2O3 C 4N ? 4. Aluminum Nitride AlN P 2N+ 5. Antimony Sb B 4N8 6. Barium Fluoride BaF2 C 2N 7. Barium Sulfate BaSO4 P 3N ? 8. Barium Titanate BaTi4O9 HP 2N5 ? 9. Barium Titanate BaTiO3 P 3N 10. Beryllium (For Sale in U.S.A. Only) Be F 2N 11. Bismuth (For Sale in U.S.A. Only) Bi B 6N ? 12. Bismuth Oxide (NO EXPORT) Bi2O3 P 2N5 ? 12A. Bismuth Telluride (For Sale in U.S.A. Only) Bi2Te3 B 5N 13. Boron B B 2N5 14. Boron Carbide B4C P 5N ? 15. Boron Nitride BN B 4N 16. Boron Phosphide BP P 3N 17. Cadmium Cd F 4N7 17A. Cadmium Sulfide CdS P 3N 17B. Cadmium Telluride CdTe B 5N 18. Calcium Carbonate CaCO3 C 3N ? 19. Calcium Fluoride CaF2 C 3N 20. Carbon (Pyrolytic) C CVD 3N ? 21. Carbon (Diamond), same as #168 (additional cost) C (cleaved ~1mm) C ? 22. Cerium Oxide CeO2 P 2N1 23. Cesium Iodide CsI O * 2N ? 23A. Cesium Bromide CsBr P * 4N 24. Chromium Cr P 4N6 24A. Chromium Carbide Cr3C2 P 2N8 25. Chromium Nitride Cr2N P 2N5 26. Chromium Oxide Cr2O3 HP 5N 27. Cobalt Co F 5N 28. Cobalt Oxide Co3O4 P 3N 29. Cobalt Silicide CoSi2 P 2N 29A. Cobalt Sulfide CoS P 2N5 30. Copper Cu F 4N5 31. Cupric Oxide CuO P 3N 32. Cuprous Oxide Cu2O EM 3N 32A. Copper Selenide CuSe B 2N5 33. Copper Sulfide CuS M 3N 34. Copper Sulfide Cu2S M 2N+? 35. Dysprosium Dy F * 3N 36. Erbium Er F * 3N ? 37. Europium Oxide Eu2O3 HP 3N 38. Gadolinium Gd F * 3N ? 39. Gallium Arsenide GaAs C 5N ? 40. Gallium Nitride GaN P 3N 41. Gallium Phosphide GaP P 2N5 42. Gallium Antimonide GaSb P 2N5 ? 42A. Gallium Selenide GaSe P 4N 42B. Gallium Sulfide Ga2S3 B 4N 43. Germanium Ge B 2N 44. Germanium Oxide GeO P 2N5 45. Gold Au F 4N 46. Hafnium Hf F 2N5 ? 46A. Hafnium Boride HfB2 P 4N7 47. Hafnium Carbide HfC B 6N 47A. Hafnium Nitride HfN P 2N5 47B. Hafnium Oxide HfO2 P 3N ? 48. Holmium Ho B 3N 49. Indium In F 4N 50. Indium Arsenide InAs C ? 50A. Indium Antimonide InSb P 3N ? 51. Indium Phosphide InP C 5N ? 52. Indium Tin Oxide10% In, Inhomogenous ITO P 4N 52A. Indium Selenide In2Se3 P 4N 52B. Indium Sulfide In2S3 P 3N8 53. Iridium Ir F 3N5 54. Iron Fe P 4N 54A. Iron Carbide Fe3C F 3N 56. Iron Fluoride FeF3 P 3N 58. Iron Oxide FeO P 3N ? 59. Iron Oxide Fe2O3 P 5N 60. Iron Oxide Fe3O4 EM 5N 61. Iron Phosphide FeP EM 3N 62. Iron Sulfide FeS2 P 3N ? 63. Lead Pb P 4N8 64. Lead Oxide PbO F 2N8 64A. Lead Telluride PbTe P 5N 65. Lead Sulfide PbS P Opt ? 66. Lanthanum Hexaboride LaB6 P 3N5 ? 66A. Lanthanum Fluoride LaF3 P Opt 67. Lutetium Fluoride LuF3 P 3N 68. Lithium Fluoride LiF P 4N 69. Magnesium Mg C * 3N 70. Magnesium Fluoride MgF2 F 3N ? 71. Magnesium Oxide MgO C 4N 72. Manganese Mn B 3N 73. Manganese Sulfide MnS B 2N5 74. Manganese Oxide MnO2 P ? 75. Mercury Sulfide HgS P 4N5 ? 75A Mercury Telluride HgTe C 5N 76. Molybdenum Mo C 4N 76A. Molybdenum Boride MoB P 2N 77. Molybdenum Carbide Mo2C F 3N5 ? 78. Molybdenum Silicide MoSi2 HP 3N 79. Molybdenum Oxide MoO3 P 2N5 ? 81. Osmium Os P 4N5 81A. Neodymium Fluoride NdF3 F 3N 81C Neodymium Oxide Nd2O3 P 2N8 82. Nickel Ni C 4N4 82A. Nickel Aluminide NiAl F 2N5 83. Nickel Oxide NiO F 3N5 ? 84. Nickel Phosphide Ni2P P 3N 85. Nickel Silicide NiSi2 P 3N ? 86. Niobium Nb P 3N7 87. Niobium Carbide NbC P 2N5 ? 88. Niobium Oxide Nb2O5 HP 3N5 ? 88A. Niobium Nitride NbN P 2N5 89. Palladium Pd P 3N 90. Platinum Pt F 3N 91. Potassium Bromide KBr F 4N ? 92. Potassium Chloride KCl C 3N5 ? 93. Potassium Iodide KI C 3N ? 93A. Praeseodymium Fluoride PrF3 C 3N8 94. Rhenium Re HP 3N7 94A. Rhenium Oxide ReO F 3N ? 96. Rhodium Rh W 2N8 97. Rubidium Chloride RbCl F 3N ? 97A. Rubidium Iodide RbI P 2N7 98. Ruthenium Ru P 3N 99. Samarium Sm P 3N 100. Scandium Sc F 2N9 101. Selenium Se C 3N 102. Silicon Si C 5N 103. Silicon Carbide SiC CVD Opt ? 104. Silicon Dioxide SiO2 EM 2N5 ? 105. 1000Å SiO2/Si SiO2 TF 3N5 106. Silicon Nitride Si3N4 HP 2N 107. 468Å Si3N4/Si Si3N4 TF 2N5 108. Silver Ag F 3N 109. Silver Chloride AgCl C * 5N 109A. Silver Oxide Ag2O P 3N ? 110. Silver Sulfide Ag2S C ? 111. Sodium Chloride NaCl C 2N5 112. Sodium Fluoride NaF C 5N 113. Strontium Fluoride SrF2 P 3N 114. Tantalum Ta F 3N5 115. Tantalum Carbide TaC HP 3N ? 116. Tantalum Nitride TaN P 4N8 117. Tantalum Oxide Ta2O5 P 1N8 ? 118. 1000Å Ta2O5/Ta Ta2O5 TF 2N 120. Tantalum Silicide TaSi2 P 2N5 121. Tellurium Te B 5N 122. Terbium Tb F 3N 123. Thallium Chloride TlCl P 3N ? 125. Thulium Tm F 2N5 126. Tin Sn F 5N 127. Tin Oxide SnO2 EM 2N5 127A. Tin Sulfide SnS P 2N5 127B. Tin Selenide SnSe P 5N 128. Titanium Ti F 2N5 128A. Titanium Al Carbide Ti2AlC P 2N ? 129. Titanium Carbide TiC HP 2N5 130. Titanium Diboride TiB2 HP 2N5 ? 131. Titanium Dioxide TiO2 EM 2N5 132. Titanium Nitride TiN P 4N5 132A. Titanium Oxide TiO HP 3N 133. Titanium Silicide TiSi2 P 3N 134. Tungsten W F 4N 135. Tungsten Carbide WC HP 4N8 137. Tungsten Oxide WO3 P 2N+ 138. Tungsten Silicide WSi2 P 2N5 139. Tungsten Sulfide WS2 P 2N8 140. Vanadium V F 2N5 141. Vanadium Carbide VC HP 4N ? 141A. Vanadium Nitride VN HP 2N5 ? 142. Vanadium Oxide V2O5 P 4N ? 142A. Ytterbium Yb F 3N 142B. Ytterbium Oxide YB2O3 P 3N 143. Yttrium Y F * 3N 143A. Yag YAlO C ? 144. Yttrium Oxide Y2O3 P 4N 145. Zinc Zn F 3N8 146. Zinc Oxide ZnO HP 3N 147. Zinc Selenide ZnSe C ? 148. Zinc Sulfide ZnS C ? 149. Zirconium Zr F 3N5 150. Zirconium Carbide ZrC HP ? 150A. Zirconium Nitride ZrN P 2N5 151. Zirconium Oxide (Mineral) ZrO2 C 2N7 ? Mineral Formula (approximate) 152. Acanthite Ag2S 153. Albite NaAlSi3O8 154. Almandine Fe32+Al2(SiO4)3 155. Andradite Ca3Fe23+(SiO4)3 156. Anorthite CaAl2Si2O8 156A. Augite (Ca,Na)(Mg,Fe,Al,Ti)(Si,Al)2O6 157. Baddeleyite ZRO2 (traces of Ti and Fe) 157A. Barite BaSO4 158. Benitoite BaTiSi3O9 159. Biotite(black mica) K(Mg,Fe2+)3(Al,Fe3+)Si3O10(OH,F)2 160. Bytownite (Na, Ca)Al(Al,Si)Si2O8 161. Calcium Carbonate CaCO3 162. Cassiterite SnO2 163. Chalcocite Cu2S 164. Cinnabar HgS 165. Chrysoberyl BeAl2O4 166. Covellite CuS 167. Cuprite Cu2O 168. Diamond, same as #21(additional cost) C (cleaved ~1mm) 169A. Diopside CaMgSi2O6 170. Dolomite CaMg(CO3)2 170A. Fayalite Fe22+SiO4 171. Fluorapatite Ca5(PO4)3F 172. Forsterite Mg2SiO4 173. Hematite Fe2O3 174. Hornblende(Amphibole) Ca2(Mg,Fe2+)4Al(Si7Al)O22(OH,F)2 175. Kyanite Al2O3.SiO2 176. Magnetite Fe3O4 177. Orthoclase K2O.Al2O3.6SiO2 177A. Pyrope Mg3Al2(SiO4)3 178. Quartz SiO2 179. Rutile TiO2 180. Sodalite Na4(AlCl)Al2(SiO4)3 180A. Spessartine Mn2+3Al2(SiO4)3 181. Spinel MgAl2O4 181B. Titanite CaTiSiO5 182. Willemite(Troosite) Zn2SiO4 183. Wollastonite CaSiO3 Note: electron probe compositions provided upon request or with standard. Some mineral standards have minor phases of other materials. SRM# National Institute of Standards & Technology (formerly NBS) Please see note below regarding alloys. Glasses B2O3 Na2O MgO Al2O3 SiO2 Cl K2O CaO TiO2 V2O5 Cr2O3 MnO2 Fe2O3 ZrO2 PbO Bi2O3 BaO ZnO CoO CuO 184. 612 14.0 2.0 72.0 12.0 +50 ppm of 51 other elements 185. 93a 12.5 3.9 2.2 80.8 .06 .01 .01 .01 .028 .04 186. K252 40.0 5.0 35.0 10.0 5.0 5.0 187. K229 30.0 70.0 188. K326 30.0 2.0 30.1 29.9 8.0 189. K309 15.0 40.0 15.0 15.0 15.0 Ti Alloys Fe C Mn P S Si Cu Zn Pb Sn Ni Cr V Mo Ti As W Zr Nb Ta Al Co 190. 654b .23 .045 .004 .023 .028 .025 4.31 .013 88.05 .008 6.34 191. 1128 .134 .011 3.04 2.96 15.13 75.64 3.06 Miscellaneous NIST Standards 192. 1104 .088 .005 61.33 35.31 2.77 .43 .07 193. 1108 .044 .0025 64.9 34.4 0.06 .39 .033 194. 1110 .033 84.5 15.2 0.03 .051 .053 195. 1230 Bal .044 .64 .023 .0007 .43 .14 2.42 14.8 .23 1.18 2.12 .24 .15 195A. 1243 .79 .024 .019 .003 .0018 .018 .007 58.78 19.20 .12 4.25 3.06 .053 1.23 12.46 195B. 1297 Bal .066 7.11 .038 .0033 .397 .442 5.34 16.69 .08 .33 .13 196. C2402 7.3 .01 .64 .007 .018 .85 .19 51.5 16.15 .22 17.1 4.29 1.5 196A. 2321 Solder : Sn 60% / Pb 40% 197. SRM-482 5 wires in one 3mm ø mount. Cu:Au (20:80, 40:60, 60:40, 80:20) + pure Cu (additional cost) 197A. SRM-481 6 wires in one 3mm ø mount. Ag:Au (pure Ag, pure Au, 20:80, 40:60, 60:40, 80:20) (additional cost) 197B. 871 Phosphor Bronze (CDA-521) (additional cost) Steels Fe C Mn P S Si Cu Zn Pb Sn Ni Cr V Mo Ti As W Zr Nb Ta Al Co 198. 461 Bal .15 .36 .053 .019 .047 .34 .003 .022 1.73 .13 .024 .3 .01 .028 .01
