The VBF-1100X-RTP-ASD is a fully automatic bottom-loading rapid heating and cooling furnace with a Φ200 mm quartz tube and an air-tight flange. It utilizes shortwave infrared lamps as heaters, achieving heating rates of 50°C/sec and a maximum temperature of 1100°C. It is an excellent tool for preparing single-atom catalysis， and annealing a wafer up to 6". The system supports multi-unit control via a single PC, communicating with robotic systems for continuous, high-throughput sample sintering. It enables remote and local control of vacuum, gas supply, sintering, and furnace operations. Combining with a robotic arm, the furnace can be operated in autonomous mode SPECIFICATIONS Power Supply Three-phase AC 208V, 50/60Hz Maximum Power 18 kW Features Ultra-fast Shortwave Infrared Heating rate of up to 50°C/s. Seamlessly integrates with robotic arms for efficient and automated sample placement. Automated Process Execution – sample loading/unloading, flange, inert gas purging, automated gas flow control, heating, temperature holding, and cooling via a Laptop Supporting multiple cycle operations High-throughput sintering Capability by deploying multiple units with the help of a single robotic arm. A dual-layer Chamber with an Air Cooling System ensures efficient thermal management and system durability. Integrated Vacuum Control with a resistance vacuum gauge, enabling micro-positive pressure control (103,000–120,000 Pa) to maintain stable furnace pressure. High-purity alumina Fiber Insulation provides superior energy efficiency and thermal insulation. Comprehensive Data Logging software records temperature, pressure, and other critical parameters, with the ability to upload data via communication interfaces. Thermocouple K-type thermocouple Heating Maximum Operating Temperature: 1100℃ (≤ 30 minutes) Long-Term Operating Temperature: 1000℃ Heating Elements: 12 shortwave infrared lamps, 1.5 kW per lamp Heating Zone: Φ210mm × 100mm Heating Rate: Room temperature to 900℃: Recommended 10℃/s, Maximum 50℃/s Cooling Rate (in a sealed furnace environment): 800℃ to 350℃: 55℃/min 350℃ to 200℃: 5℃/min Cooling Rate (in an open furnace environment): 800℃ to 350℃: 200℃/min 350℃ to 50℃: 35℃/min Temperature Control PID Automatic Temperature Control via touch screen on a separate unit Intelligent 50-segment programmable temperature control ±1℃ Temperature Control Accuracy (Optional upgrade: ±0.1℃ with Eurotherm controller) High-precision SCR (Silicon-Controlled Rectifier) intelligent power regulation: Default DB9 PC communication port for remote monitoring and control. Stainless Steel Flange Sealing System A set of water-cooled sealing flanges The upper flange has a resistance vacuum gauge, K-type thermocouple, mechanical pressure gauge, and G1/4 double ferrule gas inlet. The upper flange has a KF25 vacuum port reserved. The quartz tube plug and sample stage are placed on the lower flange. Sample Stage and Tube Block Tube Block: Made of white quartz, with two white quartz baffles fixed by three ceramic rods. Sample Stage: Diameter: 105mm, featuring a rectangular recess (76×58mm) for sample placement (customizable based on customer requirements). Software Operation software is included to connect to a PC Supports multi-units Set temperature profile, gas flow rate, and sample loading/unloading cycles. With the help of a robotic system(optional at extra cost) can execute the following workflow: Loads the sample and closes the chamber door automatically. Vacuum evacuation and purging, followed by a protective gas introduction (also configurable for air sintering or vacuum sintering). Multi-segment heating, holding, and cooling program execution (up to 50 segments). Stops gas supply, and the chamber door can open at 300°C for sample exchange. Open-source software supports embedded loop process control for robotic integration. The entire process is automatically recorded and uploaded via communication protocols. Software displays the following parameters: Furnace tube pressure values (including vacuum level). Built-in mass flow controller (MFC) with a range of 0-5000sccm. Cleaning Cycles: 0 to 3 cycles, Automated Robotic Assistance (Optional) Rated Load: 5 kg Working Radius: 900 mm Maximum Arm Reach: 1096 mm Rated Voltage: DC 48V Robot Weight: 25 kg Repeat Positioning Accuracy: ±0.02 mm Communication Protocols: TCP/IP, Modbus, Wireless Network Typical Power Consumption: 150W Water Chiller (Optional) KJ6500 Power: 220-415 VAC, 3-phase Frequency: 50 Hz/60 Hz Nominal Cooling Capacity: 51880 BTU/h, 12897 Kcal/h Compressor Power: 4.6 kW, 6.16 HP(50Hz) 5.12 kW, 6.86 HP(60Hz) Vacuum System (Optional) Mechanical Pump: Achieves a vacuum level of 10⁻² Torr. Molecular Pump: Achieves a vacuum level of 10⁻4 Torr. Application Notes One computer can operate multiple furnaces Using a robotic arm, the furnace can be operated fully automatically
