VTC-16-PW is a compact sputtering powder coater with a 2" water-cooled magnetron sputtering head and a vibration stage. Particles bounce and self-rotate on the vibration stage for homogeneous coating and functionalization. The default DC magnetron sputter is compatible with metallic targets while the RF power source is optional for non-conductive material or carbon. It is designed for the preparation of 3D printing powders and solid-state electrolytes, and also can be used for coating small flat samples for SEM without vibration.(Upgrade the coater's color to blue, vibration stage as cup shape since Jan 2020. MTI reserves the right to modify the product at any time without notice ) SPECIFICATIONS Power 220 VAC 50/60Hz; 110 V power is available via a 1000 W transformer (optional) 250 W, 150 mA max. Overcurrent protection (>150 mA) Sputtering Gun 2" DC magnetron sputtering head with water-cooling jacket for metallic targets Mechanical beam shutter Sputtering gun holder for holding the gun during sample loading. Adjustable deposition distance: 60 - 100 mm . . Vibration Stage The amplification of vibration is adjustable from 400 - 2000 RPM in terms of motor speed One 2" powder reservoir (cup shape) is on the vibration motor. Powder bounce and self rotate during the coating process. Suggested powder quantity: 1-5 ml Suggested particle size: 1 ~ 1000 microns ( Must vacuum dry before coating ) Vacuum Chamber & Safeguard Quartz glass tube, 165 mm OD. × 150 mm ID × 250 mm H Please click here to order the Quartz Chamber replacement A safeguard Cover is designed for extra safety. Control Panel 6" color touch-screen control panel with PLC integration for easy operation One panel for all parameters monitoring and control: vacuum, current Vacuum Pressure Inficon capacitance enhanced Pirani pressure gauge is included (Range: 1125 - 3.8E-5 Torr) The system requires an Ar gas tank with a pressure regulator (not included) KF25 vacuum port for vacuum pump connection. < 1.0E-2 Torr by Rotary vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets < 1.0E-5 Torr by Turbopump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air) Note: the DC coater is not suitable for sputtering Mo, W, Hf, Ir, etc. metals. You may order an RF power supply to coat high atomic weight metal ( 95 click pic 3 to order ) The ultimate vacuum may reach < 4.0E-6 Torr after baking and overnight pumping Pic. 3 Gas control One needle valve at the gas inlet is installed for pressure control The system requires an Ar tank with the pressure regulator (not included) Target One 2" Copper target is included for testing, target size: 2" dia. x 2.5mm It also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg, etc. almost every kind of metallic material Warning: Aluminum, Chromium or Nickel can be coated by this machine, but please view the recommendation coating method in the below target link Please using RF Plasma Magnetron Sputtering coater for coating non-conductive materials and carbon Water Chiller A digital temperature-controlled chill water circulator is not included. Flow rate: 16 L/min Cooling capacity: 840 W (722 kCal/hr) Compliance CE approval NRTL (UL 6100) certification is available upon request at an extra cost, please contact our sales representative for a quote Application Notes Warning: Sputtering head connects to HIGH voltage. The operator must wear gloves during operation Make sure the target, sputtering head, substrate, and heating stage are clean before coating, need to use the sandpaper and alcohol to clean and fresh the Al or Nickel target each time using Note: the powder must dry and disperse well before coating The coater can not be used under Ar glovebox, but N2 gas. If you would like to use under Ar gas glovebox, must inform us in advance, you have to a certain modification at the extra cost
