VTC-1RF-SPC is a 2 in 1 thin film coater that integrates one 1" sputtering head and one thermal evaporating crucible inside the stainless steel vacuum chamber. It is an excellent coater to produce multi-layer film for material research. Structure Input Power Single-phase 220 VAC+/- 10%, 50 / 60 Hz 4200 W (including a vacuum pump and water chiller) Megnetron Sputtering Head and Power Source One 1" Magnetron Sputter head with a High Vacuum Quick Connector is included. The head is made from sputtering from bottom to up ( Please click picture left ) The distance between the sputtering head and the sample stage is adjustable from 60 to 100 mm A manually rotated baffle plate is built between the sputtering head and the sample stage to avoid contamination One sputtering power source is included. You may choose either DC or RF source based on target materials: DC source: 500 W power for coating metallic materials (Pic 1) RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2) -- Pic 1 -- Pic 2 Thermal Evaporating One evaporation source is installed on the bottom of the vacuum chamber The tungsten heating coil is built in an alumina crucible. SS316 crucible is available upon request for evaporating Li-metal An S-type thermal couple is the installed bottom of the crucible Max. evaporation temperature is 1350oC Temperature is controlled precisely by a programmable temperature controller in a touchscreen panel. Vacuum Chamber Vacuum chamber: 250 mm Dia. x 360 mm Height, made of stainless steel View window: 100 mm diameter quartz glass with vacuum-sealed The top flange of the chamber can move up & down by an electric motor to load the sample The rotary and heatable sample holder is installed on the top flange The sample holder size: 100 mm The heating temperature of the sample holder: 700oC Max ±3. with 30 segments programmable The turbo-pump ( included) is connected to the chamber directly via a KF60 flange with an electric gate valve Electrodes of evaporation are through via the KF63 flange One KF35 flange is built to install an optional film thickness-measuring device Gas inlet and outlet port and valves are included Max vacuum level: 8x10-6 torr cold state ) Water Chiller One digital temperature-controlled recirculating water chiller is included. (Click picture to see details) Refrigeration range: 5~35 °C Flow rate: 16 L/min Pump pressure: 14 psi Control Panel 7" color touchscreen panel is installed to control Evaporation temperature Sample stage temperature and rotation speed Vacuum pump on/ off and display vacuum level Vacuum valve on/off Thickness Monitor (Optional) Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å Precision Thin Film & Coating Analysis Systems - TFMS-LD is available at extra cost Compliance CE approval NRTL certification is available upon request at extra cost, please contact our sales representative for the quote.
